Mass Transfer in Nanosize Layers of Transition Metals Under the Influence of Ion–Plasma Processing
A. K. Orlov, I. O. Kruhlov, I. E. Kotenko, S. I. Sidorenko, S. M. Voloshko
National Technical University of Ukraine ‘KPI’, 37 Peremohy Ave., 03056 Kyiv, Ukraine
Received: 21.02.2017. Download: PDF
The features of mass transfer of components in the Ni–Cu–Cr system with layers of nanometre thickness because of ion–plasma processing of different duration are investigated. The observed surface segregation of Cu and Cr atoms is associated with the generation of radiation defects and manifestation of the inverse Kirkendall effect. The possibilities of developing a new effective method of ion–plasma control of the reactivity of nanoscale layers of transition metals used to form the topology of micro- and nanoelectronic devices and protect them from corrosion are discussed.
Key words: nanoscale layers, mass transfer, ion–plasma processing, surface segregation, radiation defects, corrosion.
PACS: 61.72.up, 61.80.Jh, 68.37.Hk, 81.15.Jj, 81.40.Wx, 81.65.-b, 81.70.Jb
Citation: A. K. Orlov, I. O. Kruhlov, I. E. Kotenko, S. I. Sidorenko, and S. M. Voloshko, Mass Transfer in Nanosize Layers of Transition Metals Under the Influence of Ion–Plasma Processing, Metallofiz. Noveishie Tekhnol., 39, No. 3: 349—361 (2017) (in Ukrainian)