The New Approach to the Analysis of X-Ray Diffractograms Based on the Wavelet Transformations

I. M. Fodchuk, Yu. T. Roman, S. V. Balovsyak

Yuriy Fedkovych Chernivtsi National University, 2 Kotsyubynsky Str., UA-58012 Chernivtsi, Ukraine

Received: 26.06.2017. Download: PDF

X-ray structural studies of thin TiN films obtained by reactive magnetron sputtering are carried out. The wavelet-filtration technique by means of a set of biorthogonal wavelets is used to reduce the influence of both high-frequency noise and non-uniform background intensity on the shape of diffraction maxima. It allows us to improve the accuracy of determination of lattice period, grain size, and value of microdeformation significantly.

Key words: titanium nitride, thin films, x-ray diffraction, wavelet analysis.



PACS: 02.60.Gf, 07.85.-m, 42.30.Va, 61.05.cp, 61.72.Mm,, 81.05.Hd

Citation: I. M. Fodchuk, Yu. T. Roman, and S. V. Balovsyak, The New Approach to the Analysis of X-Ray Diffractograms Based on the Wavelet Transformations, Metallofiz. Noveishie Tekhnol., 39, No. 7: 855—863 (2017) (in Russian)

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