Explosive Crystallization of Amorphous Cobalt Films in a Strong Nonuniform Magnetic Field
Ye. M. Zubarev$^{1}$, V. M. Samofalov$^{1}$, O. Yu. Devizenko$^{1}$, V. V. Kondratenko$^{1}$, D. V. Sevriukov$^{1}$, V. A. Sevryukova$^{1}$, V. V. Mamon$^{1}$, T. I. Khramova$^{1}$, T. M. Sabov$^{2}$, O. V. Dubikovskyi$^{2}$, O. S. Oberemok$^{2}$, O. V. Kosulia$^{2}$
$^{1}$National Technical University ‘Kharkiv Polytechnic Institute’, 2 Kyrpychova Str., UA-61002 Kharkiv, Ukraine
$^{2}$V. E. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 41 Nauky Ave., UA-03028 Kyiv, Ukraine
Received: 04.07.2019; final version - 18.11.2019. Download: PDF
The mechanism of explosive crystallization of amorphous cobalt films grown on amorphous carbon in the absence and in the presence of a strong nonuniform magnetic field is studied. As found, the key factor for the realization of explosive crystallization is carbon, which enters into the cobalt film from a working C-magnetron during the deposition of a cobalt layer. The doping of the growing cobalt film with carbon atoms prolongs stage of cobalt existence in the amorphous-cluster state to a larger nominal film thickness. The magnetic field has no effect on the carbon content in cobalt films, which is approximately the same and is 3–5 at.%. As shown, a nonuniform magnetic field increases the critical thickness at which explosive crystallization begins. In films obtained without magnets in the vacuum chamber, the explosive crystallization is realized in the range of nominal thicknesses between 8.0 and 8.5 nm. In films obtained directly on a magnet, the process of explosive crystallization occurs in the range of nominal thicknesses between 10.0 and 10.5 nm.
Key words: cobalt amorphous-cluster state, explosive crystallization, nonuniform magnetic field, transmission electron microscopy.
URL: http://mfint.imp.kiev.ua/en/abstract/v42/i01/0033.html
DOI: https://doi.org/10.15407/mfint.42.01.0033
PACS: 61.05.cp, 61.05.J-, 61.43.Dq, 64.70.dg, 64.70.kd, 68.37.Og, 81.40.Wx
Citation: Ye. M. Zubarev, V. M. Samofalov, O. Yu. Devizenko, V. V. Kondratenko, D. V. Sevriukov, V. A. Sevryukova, V. V. Mamon, T. I. Khramova, T. M. Sabov, O. V. Dubikovskyi, O. S. Oberemok, and O. V. Kosulia, Explosive Crystallization of Amorphous Cobalt Films in a Strong Nonuniform Magnetic Field, Metallofiz. Noveishie Tekhnol., 42, No. 1: 33—49 (2020) (in Russian)