The process of anomalous transfer of interstitial atoms during impact deformation of the crystal surface is described theoretically. As shown that surface impact leads to the formation in the crystal of a wave of inhomogeneous atomic displacements, which propagates from the surface into the crystal depth. The formation of a deformation wave leads to a change in the interatomic distance at the wave front and a change in the potential energy for interstitial atoms. As well, interstitial atoms at the front of the deformation wave receive an additional impulse, which leads to an increase in their kinetic energy and contributes to the activationless (emission) transfer of atoms deep into the crystal.