Issues »  Volume 37, Issue 3

Dispersion (Phase) Nature of Structural Sensitivity and Informativity of Triple-Crystal Diffractometry of Defects and Strains within the Ion-Implanted Films

O. S. Skakunova, S. I. Olikhovskii, V. B. Molodkin, E. G. Len, E. M. Kislovskii, O. V. Reshetnyk, T. P. Vladimirova, E. V. Kochelab, V. V. Lizunov, S. V. Lizunova, V. L. Makivs’ka, M. G. Tolmachov, L. M. Skapa, Ya. V. Vasylyk, K. V. Fuzik

G.V. Kurdyumov Institute for Metal Physics, NAS of Ukraine, 36 Academician Vernadsky Blvd., UA-03142 Kyiv, Ukraine

Received: 26.12.2014. Download: PDF

With using the previously discovered by authors phenomenon of dispersion (phase) structural sensitivity of multiple-scattering patterns, the theoretical and experimental bases of the triple-crystal dynamical diffractometry of multilayer crystalline systems with inhomogeneous strain and randomly distributed defects are created. The dynamical character of both coherent and diffuse scattering from defects in all the layers of the system as well as the multiple scattering between layers are taken into account.

Key words: dynamical theory of diffraction, diffuse scattering, strain profile, structural defects, ion implantation, garnet.

URL: http://mfint.imp.kiev.ua/en/abstract/v37/i03/0409.html

DOI: https://doi.org/10.15407/mfint.37.03.0409

PACS: 61.05.cс, 61.05.cp, 61.72.Dd, 61.72.jd, 61.72.Nn, 61.72.Qq, 68.55.Ln

Citation: O. S. Skakunova, S. I. Olikhovskii, V. B. Molodkin, E. G. Len, E. M. Kislovskii, O. V. Reshetnyk, T. P. Vladimirova, E. V. Kochelab, V. V. Lizunov, S. V. Lizunova, V. L. Makivs’ka, M. G. Tolmachov, L. M. Skapa, Ya. V. Vasylyk, and K. V. Fuzik, Dispersion (Phase) Nature of Structural Sensitivity and Informativity of Triple-Crystal Diffractometry of Defects and Strains within the Ion-Implanted Films, Metallofiz. Noveishie Tekhnol., 37, No. 3: 409—430 (2015) (in Ukrainian)

REFERENCES
  1. D. K. Bowen and B. K. Tanner, High Resolution X-Ray Diffractometry and Topography (London: Taylor and Francis Ltd: 1998).
  2. V. Holý, U. Pietch, and T. Baumbach, High-Resolution X-ray Scattering from Thin Films and Multilayers (Berlin–Heidelberg: Springer: 1998).
  3. P. F. Fewster, X-Ray Scattering from Semiconductors (London: Imperial College Press: 2000).
  4. Diffuse Scattering and the Fundamental Properties of Materials (Eds. R. I. Barabash, G. E. Ice, and P. E. A. Turchi) (New Jersey: Momentum Press: 2009).
  5. M. Schmidbauer, X-Ray Diffuse Scattering from Self-Organized Mesoscopic Semiconductor Structures (Berlin–Heidelberg: Springer: 2010).
  6. A. M. Afanas'ev, P. A. Aleksandrov, and R. M. Imamov, Rentgenodifraktsionnaya Diagnostika Submikronnykh Sloev (Moscow: Nauka: 1989) (in Russian).
  7. V. Holý and J. Kubĕna, phys. status solidi (b), 170, No. 1: 9 (1992). Crossref
  8. A. A. Lomov, P. Zaumseil, and U. Winter, Acta Crystallogr. A, 41, No. 3: 223 (1985). Crossref
  9. B. C. Larson and W. G. Schmatz, Phys. Rev. B, 10, No. 6: 2307 (1974). Crossref
  10. L. A. Charniy, A. N. Morozov, V. T. Bublik, K. D. Scherbachev, I. V. Stepantsova, and V. M. Kaganer, J. Cryst. Growth, 118: 163 (1992). Crossref
  11. V. B. Molodkin, M. V. Kovalchuk, A. P. Shpak, S. I. Olikhovskii, Ye. M. Kyslovskyy, A. I. Nizkova, E. G. Len, T. P. Vladimirova, E. S. Skakunova, G. E. Ice, R. A. Barabash, and I. M. Karnaukhov, Diffuse Scattering and the Fundamental Properties of Materials (Eds. R. I. Barabash, G. E. Ice, and P. E. A. Turchi) (New Jersey: Momentum Press: 2009), p. 391.
  12. V. B. Molodkin, S. I. Olikhovskii, E. G. Len, E. N. Kislovskii, V. P. Kladko, O. V. Reshetnyk, T. P. Vladimirova, and B. V. Sheludchenko, phys. status solidi (a), 206, No. 8: 1761 (2009). Crossref
  13. V. B. Molodkin, S. I. Olikhovskii, Ye. M. Kyslovskyy, E. G. Len, O. V. Reshetnyk, T. P. Vladimirova, V. V. Lizunov, and S. V. Lizunova, Semiconductor Physics, Quantum Electronics and Optoelectronics, 13, No. 4: 353 (2010).
  14. S. V. Lizunova, V. B. Molodkin, S. J. Olikhovskyy, O. S. Skakunova, V. V. Molodkin, and V. V. Lizunov, Metallofiz. Noveishie Tekhnol., 33, No. 6: 791 (2011) (in Russian).
  15. S. V. Lizunova, V. B. Molodkin, S. J. Olikhovskyy, O. S. Skakunova, V. V. Molodkin, and V. V. Lizunov, Metallofiz. Noveishie Tekhnol., 33, No. 7: 855 (2011) (in Russian).
  16. V. B. Molodkin, M. V. Koval'chuk, V. F. Machulin, E. Kh. Mukhamedzhanov, S. V. Lizunova, S. I. Olikhovskiy, E. G. Len, B. V. Sheludchenko, S. V. Dmitriev, O. S. Skakunova, V. V. Molodkin, V. V. Lizunov, V. P. Klad'ko, and E. V. Pervak, Uspehi Fiziki Metallov, 12: 295 (2011) (in Russian). Crossref
  17. E. N. Kislovskii, V. B. Molodkin, S. I. Olikhovskii, E. G. Len, B. V. Sheludchenko, S. V. Lizunova, T. P. Vladimirova, E. V. Kochelab, O. V. Reshetnik, V. V. Dovganyuk, I. M. Fodchuk, T. V. Litvinchuk, and V. P. Klad'ko, J. of Surface Investigation. X-Ray, Synchrotron and Neutron Techniques, 7, No. 3: 523 (2013). Crossref
  18. V. V. Lizunov, V. B. Molodkin, S. V. Lizunova, M. G. Tolmachyov, O. S. Skakunova, S. V. Dmitriev, B. V. Sheludchenko, S. M. Brovchuk, L. M. Skapa, R. V. Lekhnyak, and K. V. Fuzik, Metallofiz. Noveishie Tekhnol., 36, No. 7: 857 (2014) (in Russian). Crossref
  19. V. V. Lizunov, V. B. Molodkin, S. I. Olikhovskii, S. V. Lizunova, N. G. Tolmachev, H. I. Nizkova, O. S. Skakunova, S. V. Dmitriev, B. V. Sheludchenko, Ya. V. Vasylyk, T. G. Sych, K. V. Fuzik, R. V. Lekhnyak, and L. M. Skapa, Metallofiz. Noveishie Tekhnol., 37, No. 2: 265 (2015) (in Russian). Crossref
  20. T. H. Johansen and D. V. Shantsev, Magneto-Optical Imaging (Dordrecht, Netherlands: Springer: 2004). Crossref
  21. S. Sugano and N. Kojima, Magneto-Optics (Berlin: Springer: 2000). Crossref
  22. R. J Gambino and T. Suzuki, Magneto-Optical Recording Materials (New York: IEEE Press: 1999). Crossref
  23. P. Paroli, Thin Solid Films, 114, Nos. 1–2: 187 (1984). Crossref
  24. A. K. Zvezdin and V. A. Kotov, Modern Magnetooptics and Magnetooptical Materials (Philadelphia: Inst. of Physics Publ.: 1997). Crossref
  25. T. Wehlus, T. Körner, S. Leitenmeier, A. Heinrich, and B. Stritzker, phys. status solidi (a), 208, No. 2: 252 (2011). Crossref
  26. Y. Yamasaki, Y. Kohara, and Y. Tokura, Phys. Rev. B, 80, No. 14: 140412(R) (2009). Crossref
  27. T. V. Dolgova, A. A. Fedyanin, O. A. Aktsipetrov, K. Nishimura, H. Uchida, and M. Inoue, J. Appl. Phys., 95, No. 11: 7330 (2004). Crossref
  28. G. F. Dionne and G. A. Allen, J. Appl. Phys., 95, No. 11: 7333 (2004). Crossref
  29. R. J. Wojciechowski, A. Lehmann-Szweykowska, R. Micnas, G. A. Gehring, and P. E. Wigen, Phys. Rev. B, 69, No. 21: 214434 (2004). Crossref
  30. P. Baettig and T. Oguchi, Chem. Mater., 20, No. 24: 7545 (2008). Crossref
  31. Y.-N. Xu, Z. Gu, and W. Y. Ching, J. Appl. Phys., 87, No. 9: 4867 (2000). Crossref
  32. V. B. Molodkin, S. I. Olikhovskii, E. N. Kislovskii, E. G. Len', and E. V. Pervak, phys. status solidi (b), 227, No. 2: 429 (2001). Crossref
  33. S. I. Olikhovskii, V. B. Molodkin, E. N. Kislovskii, E. G. Len', and E. V. Pervak, phys. status solidi (b), 231, No. 1: 199 (2002). Crossref
  34. V. B. Molodkin, S. I. Olikhovskii, E. N. Kislovskii, I. M. Fodchuk, E. S. Skakunova, E. V. Pervak, and V. V. Molodkin, phys. status solidi (a), 204, No. 8: 2606 (2007). Crossref
  35. V. B. Molodkin, S. I. Olikhovskii, E. N. Kislovskii, T. P. Vladimirova, E. S. Skakunova, R. F. Seredenko, and B. V. Sheludchenko, Phys. Rev. B, 78, No. 22: 224109 (2008). Crossref
  36. S. I. Olikhovskii, V. B. Molodkin, E. S. Skakunova, E. N. Kislovskii, and I. M. Fodchuk, phys. status solidi (a), 206, No. 8: 1790 (2009). Crossref
  37. V. B. Molodkin, M. V. Koval'chuk, I. M. Karnaukhov, V. F. Machulin, V. E. Storizhko, E. Kh. Mukhamedzhanov, A. I. Nizkova, S. V. Lizunova, E. N. Kislovskii, S. I. Olikhovskii, B. V. Sheludchenko, S. V. Dmitriev, E. S. Skakunova, V. V. Molodkin, V. V. Lizunov, V. A. Bushuev, R. N. Kyutt, B. S. Karamurzov, A. A. Dyshekov, T. I. Oranova, and Yu. P. Khapachev, Osnovy Dinamicheskoy Vysokorazreshayushchey Difraktometrii Funktsional'nykh Materialov (Nal'chik: Kabardino-Balkarskiy Universitet: 2013) (in Russian).
  38. V. B. Molodkin, M. V. Koval'chuk, I. M. Karnaukhov, V. E. Storizhko, S. V. Lizunova, S. V. Dmitriev, A. I. Nizkova, E. N. Kislovskiy, V. V. Molodkin, E. V. Pervak, A. A. Katasonov, V. V. Lizunov, E. S. Skakunova, B. S. Karamurzov, A. A. Dyshekov, A. N. Bagov, T. I. Oranova, and Yu. P. Khapachev, Osnovy Integral'noy Mnogoparametricheskoy Diffuznodinamicheskoy Difraktometrii (Nal'chik: Kabardino-Balkarskiy Universitet: 2013) (in Russian).
  39. V. B. Molodkin, S. I. Olikhovskii, M. E. Osinovskiy, V. V. Kochelab, A. Yu. Kazimirov, M. V. Koval'chuk, and F. N. Chukhovskiy, Metallofizika, 6, No. 3: 7 (1984) (in Russian).
  40. V. B. Molodkin, V. V. Nemoshkalenko, S. I. Olikhovskii, E. N. Kislovskii, O. V. Reshetnyk, T. P. Vladimirova, V. P. Krivitsky, V. F. Machulin, I. V. Prokopenko, G. E. Ice, and B. C. Larson, Metallofiz. Noveishie Tekhnol., 20, No. 11: 29 (1998).
  41. S. J. Olikhovsky, V. B. Molodkin, Ye. M. Kyslovsky, O. V. Reshetnik, T. P. Vladimirova, Ye. G. Len, G. E. Ice, R. O. Barabash, R. Kehler, and D. O. Grigoriev, Metallofiz. Noveishie Tekhnol., 27, No. 7: 947 (2005) (in Ukrainian).
  42. A. P. Shpak, V. B. Molodkin, S. J. Olikhovs'ky, Ye. M. Kyslovs'ky, O. V. Reshetnyk, T. P. Vladimirova, R. I. Barabash, and D. O. Hryhor'yev, Metallofiz. Noveishie Tekhnol., 27, No. 9: 1223 (2005) (in Ukrainian).
  43. M. A. Krivoglaz, Difraktsiya Rentgenovskikh Luchey i Neytronov v Neideal'nykh Kristallakh (Kiev: Naukova Dumka: 1983) (in Russian).
  44. I. M. Fodchuk, V. V. Dovganiuk, I. I. Gutsuliak, I. P. Yaremiy, A. Y. Bonchyk, G. V. Savytsky, I. M. Syvorotka, and O. S. Skakunova, Metallofiz. Noveishie Tekhnol., 35, No. 9: 1209 (2013) (in Russian).
  45. I. M. Fodchuk, I. I. Gutsuliak, R. A. Zaplitnyy, I. P. Yaremiy, A. Y. Bonchyk, and I. I. Syvorotka, Metallofiz. Noveishie Tekhnol., 35, No. 7: 993 (2013) (in Russian).
  46. P. Zaumseil and U. Winter, phys. status solidi (a), 70, No. 2: 497 (1982). Crossref
  47. R. A. Cowley, Acta Crystallogr. A, 43, No. 6: 825 (1987). Crossref
  48. E. L. Garstein, M. Mandelbrot, and D. Mogilyanski, J. Phys. D.: Appl. Phys., 31, No. 1: A57 (2001). Crossref
  49. P. Zaumseil, phys. status solidi (a), 91, No. 1: K31 (1985). Crossref

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