Issues »  Volume 38, Issue 9

Structural Features of Formed Coatings and Films of Refractory Compounds

O. D. Pogrebnjak, O. O. Goncharov

Sumy State University, 2 Rymskogo-Korsakova Str., 40000 Sumy, Ukraine

Received: 11.03.2016; final version - 10.08.2016. Download: PDF

A comparative analysis of the microstructure and properties of coatings based on refractory compounds is performed depending on the deposition conditions (temperature and substrate potential, partial pressure of working gas). A general regularities consisting in the presence of the columnar structure and the growth texture are revealed for hard and superhard nanostructured (nanocomposite) coatings. As shown, there are two possible directions of growth <111> and <100> for transition metals’ carbide and nitride coatings; for transition metals’ diboride coatings such a direction is <0001>. The effect of the structural state on the changes in the physical and mechanical properties of nanocrystalline coatings based on nitrides, carbides and borides of transition metals is analysed.

Key words: refractory compounds, structure, hardness, substrate potential, partial pressure.

URL: http://mfint.imp.kiev.ua/en/abstract/v38/i09/1145.html

DOI: https://doi.org/10.15407/mfint.38.09.1145

PACS: 62.20.Qp, 68.35.Gy, 68.55.J-, 68.55.Nq, 68.60.Bs, 81.05.Je, 81.15.Cd, 81.65.Lp

Citation: O. D. Pogrebnjak and O. O. Goncharov, Structural Features of Formed Coatings and Films of Refractory Compounds, Metallofiz. Noveishie Tekhnol., 38, No. 9: 1145—1166 (2016) (in Russian)

REFERENCES
  1. A. D. Pogrebnjak, A. P. Shpak, N. A. Azarenkov, and V. M. Beresnev, Physics-Uspekhi, 52: 29 (2009). Crossref
  2. R. A. Andrievski, G. V. Kalinnikov, J. Jauberteau, and J. Bates, J. Mater. Sci., 35: 2799 (2000). Crossref
  3. R. A. Andrievskiy and P. I. Spivak, Prochnost' Tugoplavkikh Soedineniy i Materialov na Ikh Osnove: Spravochnik [The Strength of Refractory Compounds and Materials on Their Basis: Handbook] (Chelyabinsk: Metallurgiya: 1989) (in Russian).
  4. A. A. Goncharov, Phys. Met. Metallogr., 111, No. 3: 314 (2011). Crossref
  5. A. D. Pogrebnjak, A. A. Bagdasaryan, I. V. Yakushchenko, and V. M. Beresnev, Rus. Chem. Rev., 83, Iss. 11: 1027 (2014). Crossref
  6. U. C. Oh, J. H. Je, and J. Y. Lee, J. Mater. Res., 10, No. 3: 634 (1995). Crossref
  7. H. H. Yang, J. H. Je, and K.-B. Lee, J. Mater. Sci. Lett., No. 14: 1635 (1995). Crossref
  8. M. Leoni, P. Scandi, S. Rossi, L. Fedrizzi, and Y. Massiani, Thin Solid Films, 345: 263 (1999). Crossref
  9. V. V. Kunchenko, A. A. Andreev, Yu. V. Kunchenko, and G. N. Kartmazov, Voprosy Atomnoy Nauki i Tekhniki, No. 3: 87 (2004) (in Russian).
  10. V. Valdova, J. Alloys Compd., 219, Nos. 1–2: 83 (1995). Crossref
  11. J. Musil, P. Banoch, and P. Zeman, Plasma Surface Engineering and Its Practical Applications (USA: Research Signpost Publisher: 2007).
  12. E. Penilla and J. Wang, J. Nanomater., 2008: 267161 (2008). Crossref
  13. G. Abadias, Surf. Coat. Technol., 202: 2223 (2008). Crossref
  14. P. Patsalas, C. Gravalidis, and S. Logothetidis, J. Appl. Phys., 96: 6234 (2004). Crossref
  15. D. Gall, S. Kodambaka, M. A. Wall, I. Petrov, and J. E. Greene, J. Appl. Phys., 93: 9086 (2003). Crossref
  16. L. Hultman, J. E. Sundgren, J. E. Greene, D. B. Bergstrom, and I. Petrov, J. Appl. Phys., 78: 5395 (1995). Crossref
  17. P. Panich, S. Wangyao, and P. Hannongbua, Rev. Adv. Mater. Sci., No. 13: 117 (2006).
  18. J.-E. Surdgren, Thin Solid Films, 128: 21 (1985). Crossref
  19. A. A. Koz'ma, S. V. Malykhin, and O. V. Sobol', Fiz. Met. Metalloved., 87, No. 3: 30 (1999) (in Russian).
  20. V. Braic, M. Braic, G. Balaceanu, A. Pavelescu, and A. Vladescu, Rom. Rep. Phys., 55, No. 3: 275 (2003).
  21. R. S. Rawat, P. Lee, T. White, and S. Lee, 27th European Physical Society Conference on Controlled Fusion and Plasma (Budapest: 2000), vol. 24B, p. 484.
  22. O. Wilhelmsson, ACTA Universitatis Upsaliensis (Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology 353) (Uppsala: 2007).
  23. Z. G. Li, M. Mori, S. Miyake, M. Kumagai, H. Saito, and Y. Muramatesu, Surf. Coat. Technol., 193: 345 (2005). Crossref
  24. H. Zeman, J. Musil, and P. Zeman, J. Vac. Sci. Technol. A, 22, No. 3: 646 (2004). Crossref
  25. J. Suna, J. Musil, V. Ondok, and J. H. Han, Surf. Coat. Technol., 200, Iss. 22–23: 6293 (2006). Crossref
  26. M. Nose, Y. Deguchi, T. Mae, E. Honbo, T. Nagae, and K. Nogi, Surf. Coat. Technol., 174–175: 261 (2003). Crossref
  27. X. D. Zhang, W. J. Meng, W. Wang, L. E. Rehn, P. M. Baldo, and R. D. Evans, Surf. Sci. Technol., 177–178: 325 (2004). Crossref
  28. J. Musil, R. Daniel, J. Soldan, and P. Zeman, Surf. Coat. Technol., 200, Iss. 12–13: 3886 (2006). Crossref
  29. O. V. Sobol, A. D. Pogrebnyak, and V. M. Beresnev, Phys. Met. Metallogr., 112, No. 2: 188 (2011). Crossref
  30. A. D. Pogrebnjak, M. V. Kaverin, and V. M. Beresnev, Tech. Phys., 59, Iss. 1: 85 (2014). Crossref
  31. A. D. Pogrebnjak, A. Pshyk, V. M. Beresnev, and B. R. Zhollybekov, J. Frict. Wear, 35, No. 1: 55 (2014). Crossref
  32. V. Ivashchenko, S. Veprek, A. D. Pogrebnjak, and B. Postolnyi, Sci. Technol. Adv. Mater., 15, No. 2: 025007 (2014). Crossref
  33. A. D. Pogrebnjak, I. V. Yakushchenko, A. A. Bagdasaryana, O. V. Bondar, R. Krause-Rehberg, G. Abadias, P. Chartier, K. Oyoshi, Y. Takeda, V. M. Beresnev, and O. V. Sobol, Mater. Chem. Phys., 147, No. 3: 1079 (2014). Crossref
  34. O. A. Goncharov, G. K. Volkova, V. A. Konovalov, and V. V. Petukhov, Metallofiz. Noveishie Tekhnol., 28, No. 12: 1621 (2006) (in Russian).
  35. A. A. Goncharov, V. A. Konovalov, and V. A. Stupak, Pis'ma v ZhTF, 33, No. 5: 12 (2007) (in Russian).
  36. A. A. Goncharov, V. V. Petukhov, D. N. Terpiy, P. I. Ignatenko, and V. A. Stupak, Neorganicheskie Materialy, 41, No. 7: 799 (2005) (in Russian).
  37. A. A. Goncharov, V. V. Petukhov, and D. S. Chayka, Fiz. Met. Metalloved., 100, No. 3: 26 (2005) (in Russian).
  38. K. L. Dahm, L. R. Jordan, J. Haase, and P. A. Dearnley, Surf. Coat. Tech., 108–109: 413 (1998). Crossref
  39. E. Kelesoglu and C. Mitterer, Surf. Coat. Technol., 98: 1483 (1998). Crossref
  40. A. A. Goncharov, Phys. Solid State, 50, No. 1: 168 (2008). Crossref
  41. D. V. Shtanskiy, S. A. Kulinich, E. A. Levashov, and J. J. Moore, Fizika Tverdogo Tela, 45, No. 6: 1122 (2003) (in Russian).
  42. H. Holleck, J. Vac. Sci. Technol. A, 4, No. 6: 2661 (1986). Crossref
  43. F. Kunc, J. Musil, P. H. Mayrhofer, and C. Mitterer, Surf. Coat. Technol., 175: 744 (2003). Crossref
  44. R. A. Andrievskiy, G. V. Kalinnikov, N. P. Koblev, Ya. M. Soyfer, and D. V. Shtanskiy, Fizika Tverdogo Tela, 39, No. 10: 1859 (1997) (in Russian).
  45. R. A. Andrievskiy, G. V. Kalinnikov, and D. V. Shtanskiy, Fizika Tverdogo Tela, 42, No. 4: 741 (2000) (in Russian).
  46. G. V. Samsonov and I. M. Vinitskiy, Tugoplavkie Soedineniya: Spravochnik [Refractory Compounds: Handbook] (Moscow: Metallurgiya: 1976) (in Russian).
  47. D. V. Shtanskiy F. V. Kiryukhantsev-Korneev, A. N. Sheveyko, I. A. Bashkova, O. V. Malochkin, E. A. Levashov, N. B. D'yakonova, and I. V. Lyasotskiy, Fizika Tverdogo Tela, 47: 242 (2005) (in Russian).
  48. A. A. Goncharov, V. V. Petukhov, S. N. Dub, and V. A. Konovalov, Phys. Metals Metallogr., 105, Iss. 4: 362 (2008). Crossref
  49. O. V. Sobol', S. N. Dub, O. N. Grigor'ev, A. N. Stetsenko, and A. A. Podtelezhnikov, Sverkhtverdye Materialy, No. 5: 38 (2005) (in Russian).
  50. O. V. Sobol', Fizika Tverdogo Tela, 49, No. 6: 1104 (2007) (in Russian).
  51. A. A. Goncharov, S. N. Dub, A. V. Agulov, and V. V. Petukhov, J. Superhard Mater., 37, No. 6: 422 (2015). Crossref
  52. A. I. Bazhin, A. A. Goncharov, A. D. Pogrebnyak, V. A. Stupak, and S. A. Goncharova, Phys. Metals Metallogr., 117, Iss. 6: 594 (2016). Crossref

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