Explosive Crystallization of Films of Amorphous Cobalt on a Sublayer of Carbon

Issues » Volume 40, Issue 3

E. N. Zubarev $^{1}$ , O. Yu. Devizenko $^{1}$ , V. V. Kondratenko $^{1}$ , D. V. Sevriukov $^{1}$ , V. A. Sevryukova $^{1}$ , O. S. Garbuz $^{2}$ , T. M. Sabov $^{3}$ , O. V. Dubikovskyi $^{3}$ , O. S. Oberemok $^{3}$ , V. P. Melnik $^{3}$

$^{1}$ National Technical University ‘Kharkiv Polytechnic Institute’, 21 Kyrpychov Str., 61002 Kharkiv, Ukraine
$^{2}$ B.I. Verkin Institute for Low Temperature Physics and Engineering, NAS of Ukraine, 47 Nauky Ave., 61103 Kharkiv, Ukraine
$^{3}$ V. E. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 41 Nauky Ave., UA-03028 Kyiv, Ukraine

Received: 18.01.2018. Download: PDF

The mechanism of explosive crystallization of the amorphous cobalt films grown on an amorphous carbon by the DC-magnetron sputtering is studied by means of transmission electron microscopy, electron diffraction, small-angle X-ray diffraction, and secondary ion mass spectrometry. As established, the operating C-magnetron during both the deposition of the cobalt layer as well as the decrease in the cobalt-deposition rate result to an increase of the nominal thickness of the cobalt layer, $t_{Co,nom}$ , at which it is in an amorphous–cluster state with a small fraction of the nanocrystalline cobalt phase. An increase of the nominal thickness of cobalt to a boundary value of $t_{bd} \cong$ 5.0 nm leads to the appearance of both crystalline regions characterising the normal crystallization (stacking faults) and extensive regions with the zone axis [0001] characterising the explosive crystallization (without stacking faults). An increase in the nominal thickness of existence of an amorphous–cluster phase to a critical value of $t_{cr} \cong$ 6.0 nm is accompanied with cobalt crystallization by means of the mechanism of explosive crystallization, because of which a highly textured h.c.p.-Co lattice film with an [0001] axis perpendicular to the substrate is formed.

Key words: cobalt, amorphous–cluster state, explosive crystallization, transmission electron microscopy (TEM).

URL: http://mfint.imp.kiev.ua/en/abstract/v40/i03/0359.html

DOI: https://doi.org/10.15407/mfint.40.03.0359

PACS: 07.85.Fv, 61.05.cm, 61.05.J-, 68.37.Lp, 68.49.Sf, 81.15.Cd, 82.80.Ms

Citation: E. N. Zubarev, O. Yu. Devizenko, V. V. Kondratenko, D. V. Sevriukov, V. A. Sevryukova, O. S. Garbuz, T. M. Sabov, O. V. Dubikovskyi, O. S. Oberemok, and V. P. Melnik, Explosive Crystallization of Films of Amorphous Cobalt on a Sublayer of Carbon, Metallofiz. Noveishie Tekhnol., 40, No. 3: 359—379 (2018) (in Russian)

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