Influence of Magnetron Sputtering Parameters on Mechanical and Tribological Properties of Carbon Nitride Coatings
N. V. Vigilianska$^{1}$, O. V. Volos$^{1}$, V. G. Zadoya$^{1}$, V. F. Gorban$^{2}$, V. I. Zakiev$^{3}$
$^{1}$E. O. Paton Electric Welding Institute, NAS of Ukraine, 11 Kazymyr Malevych Str., UA-03150 Kyiv, Ukraine
$^{2}$I. M. Frantsevich Institute for Problems in Materials Science, NAS of Ukraine, 3 Omeljan Pritsak Str., UA-03142 Kyiv, Ukraine
$^{3}$National Aviation University, 1 Lyubomyr Huzar Ave., UA-03058 Kyiv, Ukraine
Received: 6.02.2023; final version - 28.02.2023. Download: PDF
This work is devoted to investigation of mechanical and tribological properties of carbon nitride (CN$_{x}$) coatings deposited on the titanium IM125 and steel AISI321 substrates by the method of reactive magnetron sputtering of a graphite target at direct current in a mixture of gases argon/nitrogen. As shown, at pressure $p$ = 0.35 Pа, nitrogen concentration in a mixture of gases $C$ = 42-58%, substrate temperature $T_{substr}$ = 130°C, the highest values of hardness $H$ = 15/20 GPa, modulus of elasticity $E^{*}$ = 120-132 GPa, normalized hardness $H/E^{*}$ = 0.130-0.152, elastic deformation $\varepsilon_{es}$ = 4.03-4.6% are obtained, indicating increased ductility and wear resistance of the coating under friction. Wear-resistance testing conducted under dry friction by means of the ball-on-disc and ball-section methods show that high wear resistance is found in CN$_{x}$ coatings with the highest carbon ordering, and it is confirmed by high values of normalized hardness $H/E^{*}$ and $\varepsilon_{es}$. Testing in blood plasma of titanium IM125 samples with CN$_{x}$ coating in friction pair with chirulen yields low values of friction coefficient and wear intensity of chirulen equal to 0.079 and 0.65 mm/km, respectively.
Key words: reactive magnetron sputtering, carbon nitride coatings, microindenting, tribological properties, graphite target, biomedical compatibility.
URL: https://mfint.imp.kiev.ua/en/abstract/v45/i05/0603.html
DOI: https://doi.org/10.15407/mfint.45.05.0603
PACS: 46.55.+d, 62.20.Qp, 68.60.Bs, 81.15.Cd, 81.40.Pq, 87.85.jj
Citation: N. V. Vigilianska, O. V. Volos, V. G. Zadoya, V. F. Gorban, and V. I. Zakiev, Influence of Magnetron Sputtering Parameters on Mechanical and Tribological Properties of Carbon Nitride Coatings, Metallofiz. Noveishie Tekhnol., 45, No. 5: 603—614 (2023)