Pulsed Vacuum-Arc Plasma Source for Multicomponent Coatings
Iu. O. Sysoiev, Yu. V. Shyrokyi, K. V. Fesenko
National Aerospace University ‘Kharkiv Aviation Institute’, 17, Vadym Man’ko Str., 61070 Kharkiv, Ukraine
Received: 04.11.2024; final version - 20.12.2024. Download: PDF
The design and operating principle of a pulsed vacuum-arc plasma source for obtaining multicomponent coatings are presented. The proposed composite cathode assembly of this plasma source has a base made of a metal with high thermal conductivity, shaped like a cylinder with end surfaces, one of which is cooled. The cathode base has through holes arranged uniformly concentrically around the axis of the base, into which cylindrical inserts made of metals included in the coating composition are vacuum-sealed. The inserts are made in the form of sleeves with an insulator containing an igniting electrode tightly fitted inside each insert. In the case when the base material is part of the coating composition, instead of at least one hole for the insert, the cylindrical base has holes, into which insulators with igniting electrodes are vacuum-sealed. The principles of operation of the pulsed plasma source with the proposed composite cathode assembly for producing multicomponent coatings of a specified composition are described. Practical tests of the developed plasma source in the coating deposition mode (with an arc current amplitude of 420 A, arc pulse durations of 50 μs for titanium, 45 μs for molybdenum, and 665 μs for aluminium) at varying pulse frequencies demonstrated that the obtained multicomponent coatings closely match the specified composition, and the pulsed plasma source is characterized by reliable performance.
Key words: vacuum-arc coatings, multicomponent coatings, vacuum-arc discharge, pulsed plasma source, composite cathode assembly.
URL: https://mfint.imp.kiev.ua/en/abstract/v47/i10/1027.html
DOI: https://doi.org/10.15407/mfint.47.10.1027
PACS: 52.50.Dg, 52.77.-j, 68.35.Dv, 68.47.De, 81.15.Gh, 81.15.Rs, 89.20.Bb
Citation: Iu. O. Sysoiev, Yu. V. Shyrokyi, and K. V. Fesenko, Pulsed Vacuum-Arc Plasma Source for Multicomponent Coatings, Metallofiz. Noveishie Tekhnol., 47, No. 10: 1027–1042 (2025)