Fabrication and Characterization of CuO/Cu<sub>2</sub>O Thin-Film Heterostructures on Si/ZnO Substrates <i>via</i> Magnetron Sputtering for Photovoltaic Applications

Issues » Volume 48, Issue 9

Fabrication and Characterization of CuO/Cu₂O Thin-Film Heterostructures on Si/ZnO Substrates via Magnetron Sputtering for Photovoltaic Applications

I. O. Kosimov$^{1}$, Sh. T. Khozhiev$^{1,2}$, K. T. Dovranov$^{3}$, M. A. Davlatov$^{4}$, F. F. Arzikulov$^{2,5}$, U. Kh. Kholiqov$^{5}$

$^{1}$O. S. Sodikov Institute of Bioorganic Chemistry, Academy of Sciences of the Uzbekistan Republic, 83 Mirzo Ulugbek Ave., UZ-100125 Tashkent, Republic of Uzbekistan
$^{2}$Tashkent State Medical University, 2 Farabi Str., UZ-100109 Tashkent, Republic of Uzbekistan
$^{3}$Karshi State University, 17 Kuchabag Str., UZ-180119 Karshi, Republic of Uzbekistan
$^{4}$Karshi State Technical University, 225 Mustaqillik Ave., UZ-180100 Karshi, Republic of Uzbekistan
$^{5}$Termez State University of Engineering and Agricultural Technologies, 228A Islom Karimov Str., UZ-190100 Termez, Republic of Uzbekistan

Received: 16.08.2025; final version - 16.06.2026. Download: PDF

In this work, CuO and Cu₂O thin-film heterostructures are fabricated on Si/ZnO substrates using the magnetron sputtering technique under varying substrate preparation conditions. The deposition process is performed in three modes: without substrate heating, with heating at 600_oC, and with heating at 600–800_oC followed by glow discharge ion cleaning. Comprehensive characterization is carried out to investigate the crystallinity, phase composition, surface morphology, and optical properties of the films. X-ray diffraction (XRD) analysis reveals that high-temperature heating combined with ion cleaning results in well-crystallized, dense, and smooth films with a pure-phase composition. Particularly, Cu₂O films grown on ion-cleaned substrates at 800_oC exhibited 100% crystalline-phase formation. Scanning electron microscopy (SEM) and energy-dispersive spectroscopy (EDS) confirmed the uniform distribution of nanosize grains, while Raman spectroscopy validated the phase identification of CuO and Cu₂O. The results indicate that optimizing substrate temperature and surface pretreatment significantly enhances the structural and optical quality of copper-oxide semiconductor layers. The fabricated CuO/Cu₂O heterostructures demonstrate strong potential for use in efficient and environmentally friendly solar-cell devices.

Key words: CuO, Cu₂O, thin films, magnetron sputtering, heterostructures, crystallinity, SEM, Raman spectroscopy, solar cells.

URL: https://mfint.imp.kiev.ua/en/abstract/v48/i09/0999.html

DOI: https://doi.org/10.15407/mfint.48.09.0999

PACS: 07.05.Fb, 61.66.Fn, 68.37.Hk, 68.55.Nq, 72.20.Pa, 72.40.+w, 81.15.Cd

Citation: I. O. Kosimov, Sh. T. Khozhiev, K. T. Dovranov, M. A. Davlatov, F. F. Arzikulov, and U. Kh. Kholiqov, Fabrication and Characterization of CuO/Cu₂O Thin-Film Heterostructures on Si/ZnO Substrates via Magnetron Sputtering for Photovoltaic Applications, Metallofiz. Noveishie Tekhnol., 48, No. 9: 999–1010 (2026)

REFERENCES

T. Minami, Y. Nishi, T. Miyata, and J. I. Nomoto, Appl. Phys. Express, 4, No. 6: 062301 (2011).
A. Mittiga, E. Salza, F. Sarto, M. Tucci, and R. Vasanthi, Appl. Phys. Lett., 88, No. 16: 163502 (2006).
M. Izaki, T. Shinagawa, K. T. Mizuno, Y. Ida, M. Inaba, and A. Tasaka, J. Phys. D: Appl. Phys., 40, No. 11: 3326 (2007).
S. S. Jeong, A. Mittiga, E. Salza, A. Masci, and S. Passerini, Electrochim. Acta, 53, No. 5: 2226 (2008).
M. Izaki, K. T. Mizuno, T. Shinagawa, M. Inaba, and A. Tasaka, J. Electrochem. Soc., 153, No. 9: C668 (2006).
K. Fujimoto, T. Oku, T. Akiyama, and A. Suzuki, J. Phys.: Conf. Ser., 433: 012024 (2013).
K. Nakaoka and K. Ogura, J. Electrochem. Soc., 149, No. 11: C579 (2002).
K. Fujimoto, T. Oku, and T. Akiyama, J. Ceram. Soc. Jpn., 119, No. 1390: 402 (2011).
T. Oku, T. Noma, A. Suzuki, K. Kikuchi, and S. Kikuchi, J. Phys. Chem. Solids, 71, No. 4: 551 (2010).
T. Oku, R. Motoyoshi, K. Fujimoto, T. Akiyama, B. Jeyadevan, and J. Cuya, J. Phys. Chem. Solids, 72, No. 11: 1206 (2011).
M. I. Domnina, S. K. Filatov, I. Zyuzyukina, and L. P. Vergasova, Neorg. Mater., 22: 1743 (1986).
M. A. Davlatov, K. T. Davranov, X. T. Dovranov, S. N. Xusanov, A. R. Kodirov, and S. Xolikulova, East Eur. J. Phys., 2: 330 (2025).
H. Kidowaki, T. Oku, and T. Akiyama, J. Phys.: Conf. Ser., 352: 012022 (2012).
T. Oku, A. Takeda, A. Nagata, K. Fujimoto, T. Akiyama, and A. Suzuki, J. Phys.: Conf. Ser., 352: 012024 (2012).
K. T. Dovranov, M. Vinnichenko, M. Normuradov, X. Davranov, D. Nabiyev, M. Davlatov, A. Kodirov, P. Parmonov, and N. Kurbonov, Proc. Int. Conf. Electrical Engineering and Photonics (EExPolytech) (2024), p. 308.
T. Oku, A. Takeda, A. Nagata, R. Motoyoshi, K. Fujimoto, T. Noma, and E. Ōsawa, Light Harvesting Nanomaterials (Bentham Science Publishers: 2015).
K. T. Dovranov, M. T. Normuradov, M. A. Davlatov, K. T. Dovranov, T. Toshev, and N. Kurbonov, East Eur. J. Phys., No. 3: 350 (2024).
P. Engelhart, N. P. Harder, R. Grischke, A. Merkle, R. Meyer, and R. Brendel, Prog. Photovolt. Res. Appl., 15, No. 3: 237 (2007).
B. K. Meyer, A. Polity, D. Reppin, M. Becker, P. Hering, P. J. Klar, and C. Ronning, Phys. Status Solidi B, 249, No. 8: 1487 (2012).