Structure and Photocatalytic Properties of Titania Nanofilms Deposited by Reactive Magnetron Sputtering

Issues » Volume 36, Issue 5

A. A. Goncharov$^{1}$, A. N. Dobrovolsky$^{1}$, E. G. Kostin$^{2}$, I. S. Petrik$^{3}$, E. K. Frolova$^{1}$

$^{1}$Institute of Physics, NAS of Ukraine, 46 Nauky Ave., 03028 Kyiv, Ukraine
$^{2}$Institute for Nuclear Research, NAS of Ukraine, 47 Nauky Ave., 03680 Kyiv, Ukraine
$^{3}$O.O. Chuiko Institute of Surface Chemistry, NAS of Ukraine, 17 General Naumov Str., 03164 Kyiv, Ukraine

Received: 04.12.2013. Download: PDF

Titanium dioxide is the environmentally friendly photocatalyst with many interesting and attractive properties for industrial applications. We describe the reactive deposition of TiO$_{2}$ nanofilms by inverted gas cylindrical DC magnetron. The obtained samples are characterized by means of ellipsometry, Raman spectroscopy, AFM, and optical spectroscopy. The results show that structure, morphology, and photocatalytic activity of films vary with the variation of deposition conditions.

Key words: nanofilms, titanium dioxide coatings, reactive magnetron sputtering, photocatalysis.

URL: http://mfint.imp.kiev.ua/en/abstract/v36/i05/0613.html

DOI: https://doi.org/10.15407/mfint.36.05.0613

PACS: 68.37.Ps, 68.47.Gh, 68.55.J-, 78.20.Ci, 78.30.Hv, 81.15.Gh, 82.50.-m

Citation: A. A. Goncharov, A. N. Dobrovolsky, E. G. Kostin, I. S. Petrik, and E. K. Frolova, Structure and Photocatalytic Properties of Titania Nanofilms Deposited by Reactive Magnetron Sputtering, Metallofiz. Noveishie Tekhnol., 36, No. 5: 613—632 (2014) (in Russian)

REFERENCES

S. Tanemura, L. Miao, W. Wunderlich, M. Tanemura, Yu. Mori, Sh. Toh, and K. Kaneko, Sci. Technol. Adv. Mat., 6: 11 (2005). Crossref
I. V. Blonskij, A. A. Goncharov, A. V. Demchishin, A. N. Evsjukov, E. G. Kostin, V. A. Sal'nikov, A. G. Tereshhenko, and L. N. Tkachenko, Zhurnal Tekhnicheskoi Fiziki, 79, No. 7: 127 (2009).
Y. H. Han, S. J. Jung, and J. J. Lee, Surf. Coat. Technol., 201, Nos. 9–11: 5387 (2007). Crossref
S. Hashimoto and A. Tanaka, Surf. Interface Anal., 34, No. 1: 262 (2002). Crossref
K. Ellmer and R. Mientus, Proc. of 11 Conf. on High Vacuum, Interfaces and Thin Films (March 7–11, 1994, Dresden), p. 131.
R. J. Gonzalez, Raman Infrared, X-Ray and EELS Studies of Nanophase Titania (Thesis of Disser. for PhD) (Blacksburg: Virginia Polytechnic Institute and State University: 1996).
R. Swanepoel, J. Phys. E: Sci. Instrum., 16: 1214 (1983). Crossref
A. Valeev, Opt. Spektrosk., 15: 269 (1963).
S. K. Deb, R. Ellingson, S. Ferrere, A. J. Frank, B. A. Gregg, A. J. Nozik, N. Park, and G. Schlichthorl, World Conference and Exhibition on Photovoltaic Solar Energy Conversion (July 6–10, 1998, Vienna), p. 6.
U. Diebold, Surf. Sci. Rep., 48: 53 (2003). Crossref
I. S. Petryk, N. P. Smirnova, O. K. Frolova, O. V. Turchyn, and H. M. Yeremenko, Khimiya, Fizyka ta Tekhnolohiya Poverkhni (Chemistry, Physics and Technology of Surface), 10: 90 (2004) (in Ukrainian).
I. S. Petryk, N. P. Smirnova, A. M. Yeremenko, O. K. Frolova, and O. I. Orans'ka, Fizyka i Khimiya Tverdoho Tila (Physics and Chemistry of Solid State), 13, No. 2: 242 (2012) (in Ukrainian).