Simulation and Diagnostics of Strains in the Subsurface Layers of Gadolinium—Gallium Garnet Single Crystals Implanted with F+ Ions
V. О. Kotsyubynskyy1, V. M. Pylypiv1, B. K. Ostafiychuk1, I. P. Yaremiy1, O. Z. Garpul’1, E. S. Skakunova2, V. B. Molodkin2, S. I. Olikhovskyy2
1Vasyl Stefanyk Precarpathian National University, 57 Shevchenko Str., 76018 Ivano-Frankivsk, Ukraine
2G.V. Kurdyumov Institute for Metal Physics, NAS of Ukraine, 36 Academician Vernadsky Blvd., UA-03680 Kyiv-142, Ukraine
Received: 17.06.2014. Download: PDF
Elastic strain distributions through depth in the subsurface layer of gadolinium—gallium garnet single crystals implanted by F+ ions with energy of 90 keV are determined by means of the high-resolution X-ray diffraction measurement data processing with using the statistical dynamical theory of X-ray diffraction in imperfect crystals. The dependences of strained-crystal characteristics on the implantation dose are analysed.
Key words: strain, ion implantation, gadolinium—gallium garnet, statistical dynamical theory of X-ray diffraction.
URL: http://mfint.imp.kiev.ua/en/abstract/v36/i08/1049.html
DOI: https://doi.org/10.15407/mfint.36.08.1049
PACS: 61.05.cp, 61.72.Dd, 61.72.Hh, 61.80.Jh, 61.82.Fk, 68.55.Ln
Citation: V. О. Kotsyubynskyy, V. M. Pylypiv, B. K. Ostafiychuk, I. P. Yaremiy, O. Z. Garpul’, E. S. Skakunova, V. B. Molodkin, and S. I. Olikhovskyy, Simulation and Diagnostics of Strains in the Subsurface Layers of Gadolinium—Gallium Garnet Single Crystals Implanted with F+ Ions, Metallofiz. Noveishie Tekhnol., 36, No. 8: 1049—1057 (2014) (in Ukrainian)