Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor

Issues » Volume 37, Issue 4

E. M. Rudenko $^{1}$ , I. V. Korotash $^{1}$ , D. Y. Polotskiy $^{1}$ , L. S. Osipov $^{1}$ , M. V. Dyakin $^{1}$ , T. A. Prikhna $^{2}$ , A. P. Shapovalov $^{2}$

$^{1}$ G.V. Kurdyumov Institute for Metal Physics, NAS of Ukraine, 36 Academician Vernadsky Blvd., UA-03142 Kyiv, Ukraine
$^{2}$ V. Bakul Institute for Superhard Materials, NAS of Ukraine, 2 Avtozavods’ka Str., UA-04074 Kyiv, Ukraine

Received: 19.12.2014. Download: PDF

The features of the physical mechanisms of controlled ion-plasma formation of the new functional nanomaterials are investigated. The technological regimes of formation of functional nanostructured materials under combined impact of several plasma sources are investigated; the structural and electrical properties of the obtained TiN films are studied. The structures of films are studied with scanning tunnelling microscope JSPM-4500/4610 interlocked with an atomic force microscope. As shown, the optimized helicon-arc reactor demonstrates the unique properties and provides controlled low-temperature formation of the dense regular TiN nanostructures with the sizes from a few to tens of nanometres.

Key words: TiN films, plasma, nanostructures, helicon-arc reactor.

URL: http://mfint.imp.kiev.ua/en/abstract/v37/i04/0499.html

DOI: https://doi.org/10.15407/mfint.37.04.0499

PACS: 52.50.Dg, 52.50.Qt, 61.46.Bc, 68.35.Ct, 68.35.Dv, 81.16.Rf, 82.33.Xj

Citation: E. M. Rudenko, I. V. Korotash, D. Y. Polotskiy, L. S. Osipov, M. V. Dyakin, T. A. Prikhna, and A. P. Shapovalov, Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor, Metallofiz. Noveishie Tekhnol., 37, No. 4: 499—508 (2015)

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