Issues »  Volume 38, Issue 3

Structural and X-Ray—Optical Characteristics of the W/Si Multilayer X-Ray Mirrors

Yu. P. Pershin$^{1}$, A. Yu. Devizenko$^{1}$, V. V. Kondratenko$^{1}$, H. Modrow$^{2}$, F.-J. Hormes$^{3}$

$^{1}$National Technical University ‘Kharkiv Polytechnic Institute’, 21 Frunze Str., 61002 Kharkiv, Ukraine
$^{2}$Physikalisches Institut, Rheinische Friedrich-Wilhelms Universität Bonn, 12 Nuβallee, D-5315 Bundesrepublik, Deutschlan
$^{3}$Canadian Light Source, University of Saskatchewan, 101 Premeter Road, SK S7NOX4 Saskatoon, Canada

Received: 13.01.2016. Download: PDF

By methods of X-ray diffraction in hard ($\lambda =$ 0.154 nm) and soft (0.8 $< \lambda <$ 2.4 nm) ranges, the structure and optical properties for series of W/Si multilayer X-ray mirrors (MXMs) with periods of 1—6 nm are studied. MXMs are deposited with DC magnetron sputtering. Mixed interlayers at MXM interfaces with composition close to WSi$_{2}$ make the main contribution to a reduction of MXM reflectivity at soft X-rays ($\lambda =$ 2.36 nm). A possibility to fabricate MXMs with resolution of at least 5 times better than standard W/Si MXM in the soft X-ray range is demonstrated.

Key words: multilayer X-ray mirror, soft X-rays, reflectivity, resolution, interface interaction, silicide.

URL: http://mfint.imp.kiev.ua/en/abstract/v38/i03/0367.html

DOI: https://doi.org/10.15407/mfint.38.03.0367

PACS: 07.85.Fv, 41.50.+h, 61.05.cf, 61.05.cm, 61.05.cp, 68.35.Fx, 78.67.Pt, 81.15.Cd

Citation: Yu. P. Pershin, A. Yu. Devizenko, V. V. Kondratenko, H. Modrow, and F.-J. Hormes, Structural and X-Ray—Optical Characteristics of the W/Si Multilayer X-Ray Mirrors, Metallofiz. Noveishie Tekhnol., 38, No. 3: 367—388 (2016) (in Russian)

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