Determination of a Thickness of Layers of Multilayer Periodic Coatings by a Method of the Rutherford Backscattering

Issues » Volume 38, Issue 6

V. N. Kolomiyets $^{1}$ , I. N. Kononenko $^{1}$ , S. N. Kravchenko $^{1}$ , M. I. Zakharets $^{1}$ , V. Yu. Storizhko $^{1}$ , V. I. Vozny $^{1}$ , A. N. Buhay $^{1}$ , A. Yu. Devizenko $^{2}$

$^{1}$ Institute of Applied Physics, NAS of Ukraine, 58 Petropavlivska Str., 40000 Sumy, Ukraine
$^{2}$ National Technical University ‘Kharkiv Polytechnic Institute’, 21 Kyrpychov Str., 61002 Kharkiv, Ukraine

Received: 10.05.2016. Download: PDF

The periodic multilayer [Со/С] $_{10}$ coating is deposited by means of the magnetron sputtering. The thicknesses of the cobalt and carbon layers are determined by the Rutherford backscattering (RBS) method. These results are in a good agreement (with divergence less than 6%) with results of simulation of small-angle X-ray diffraction.

Key words: periodic of multilayer coating, Rutherford backscattering, small-angle X-ray diffraction.

URL: http://mfint.imp.kiev.ua/en/abstract/v38/i06/0815.html

DOI: https://doi.org/10.15407/mfint.38.06.0815

PACS: 29.30.Ep, 34.50.-s, 61.05.cf, 61.05.cp, 68.55.J-, 81.15.Cd, 82.80.Yc

Citation: V. N. Kolomiyets, I. N. Kononenko, S. N. Kravchenko, M. I. Zakharets, V. Yu. Storizhko, V. I. Vozny, A. N. Buhay, and A. Yu. Devizenko, Determination of a Thickness of Layers of Multilayer Periodic Coatings by a Method of the Rutherford Backscattering, Metallofiz. Noveishie Tekhnol., 38, No. 6: 815—823 (2016) (in Russian)

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