Changes of Structure of Zr/Mg Multilayer X-Ray Mirrors with Growth of Thickness of Nanosize Layers of Magnesium

L. E. Konotopsky, I. F. Mikhailov, I. A. Kopylets, V. V. Mamon, V. V. Kondratenko

National Technical University ‘Kharkiv Polytechnic Institute’, 21 Kyrpychov Str., 61002 Kharkiv, Ukraine

Received: 12.06.2017. Download: PDF

Structure of Zr/Mg multilayer x-ray mirrors (MXMs) deposited by direct-flow magnetron sputtering is studied by x-ray diffraction methods. X-ray diffraction curve ($\lambda$ = 0.154 nm) has one diffraction peak (2$\theta \cong$ 34.6°) and, at least, two superlattice satellites within the range 31°–38°. It means that Zr/Mg MXMs scatter x-rays coherently due to low mismatch (1.2%) between the lattice parameters of Mg and Zr layers and high level of multilayer periodicity. In this work, for the first time, processing and analysing coherent diffraction data are applied to describe features of MXMs grows. Obtained results in combination with low-angle x-ray diffraction data allow determining the thickness ($H_{\textrm{Mg}}$ < 5.2 nm), for which magnesium layers are discontinuous. As demonstrated, the Zr/Mg MXMs with the Mg layers thicker than 5.2 nm have low interface roughness ($\sigma \cong$ 0.4 nm) and can provide high level of reflectance.

Key words: multilayer x-ray mirror, x-ray phase analysis, DC magnetron sputtering, magnesium, zirconium.

URL: http://mfint.imp.kiev.ua/en/abstract/v39/i06/0767.html

DOI: https://doi.org/10.15407/mfint.39.06.0767

PACS: 07.85.Fv, 61.05.cf, 61.05.cm, 61.05.cp, 68.65.Ac, 81.15.Cd

Citation: L. E. Konotopsky, I. F. Mikhailov, I. A. Kopylets, V. V. Mamon, and V. V. Kondratenko, Changes of Structure of Zr/Mg Multilayer X-Ray Mirrors with Growth of Thickness of Nanosize Layers of Magnesium, Metallofiz. Noveishie Tekhnol., 39, No. 6: 767—778 (2017) (in Russian)


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