Structural and Phase Transformations in Nanoscale Cu/Cr System under Heat and Ion Actions
I. O. Kruhlov, I. E. Kotenko, V. O. Gryshchenko, S. I. Sidorenko, S. M. Voloshko
National Technical University of Ukraine ‘Igor Sikorsky Kyiv Polytechnic Institute’, 37 Peremohy Ave., UA-03056 Kyiv, Ukraine
Received: 11.09.2018. Download: PDF
The features of the structure and phase composition formation in the Cu(25 nm)/Cr(25 nm) system during annealing in a vacuum over a wide temperature range are investigated. The development of redox processes, which can be effectively controlled by using additional ion-plasma treatment, is registered. The low-energy ion impact allows stabilizing the nanocrystalline structure by inhibiting the recrystallization processes and, thereby, to increase the thermal stability of the working film elements of micro- and nanoelectronic devices.
Key words: nanoscale system, ion-plasma treatment, annealing, oxide formation, microstructure.
PACS: 61.80.Jh, 64.70.kd, 68.35.Rh, 81.40.Ef, 81.40.Wx, 81.65.Mq
Citation: I. O. Kruhlov, I. E. Kotenko, V. O. Gryshchenko, S. I. Sidorenko, and S. M. Voloshko, Structural and Phase Transformations in Nanoscale Cu/Cr System under Heat and Ion Actions, Metallofiz. Noveishie Tekhnol., 41, No. 1: 1—11 (2019) (in Russian)