Nanoscaled NiC powder is obtained by mechanical alloying of two equiatomic charges of Ni–carbon nanotubes and Ni–graphite in a high-energy planetary ball mill. Crystal structure of this carbide is a modified ZnS sphalerite type. Powder of NiC carbide is compacted by cold pressing at a pressure of 0.2 GPa, and the material obtained is used as a target for coating deposition by an electron beam technique. Thin films are deposited either on substrates from silicon wafer or fused glass. The phase composition of as-deposited coatings and after annealing at 900°C is studied. As shown, an annealing in air up to 900°С does not lead to cracking or peeling of the coatings from the substrate.