Issues »  Volume 44, Issue 2

Magnetron Sputtering System with Cylindrical Magnetron for Obtaining of Internal Protective Coatings for Increasing a Pipe Resource

O. I. Shkurat$^{1}$, V. A. Baturin$^{1}$, S. M. Kravchenko$^{1}$, V. M. Kolomiets$^{1}$, I. M. Kononenko$^{1}$, І. G. Chyzhov$^{1}$, P. E. Samoilov$^{1}$, Yu. A. Pavlenko$^{1}$, S. O. Firstov$^{2}$, V. F. Gorban$^{2}$, M. I. Danylenko$^{2}$

$^{1}$Institute of Applied Physics, NAS of Ukraine, 58 Petropavlivska Str., 40000 Sumy, Ukraine
$^{2}$I. M. Frantsevich Institute for Problems in Materials Science, NAS of Ukraine, 3 Academician Krzhyzhanovsky Str., UA-03142 Kyiv, Ukraine

Received: 29.09.2019; final version - 10.10.2021. Download: PDF

This work presents a magnetron sputtering system with a cylindrical magnetron to can be used for protective coatings in the internal surface of pipes. The main advantage of the system is to operate in both constant and pulse current mode, to perform the preliminary surface cleaning and to form a single-layer or multi-layer coating in one technological cycle. The tantalum and chromium coatings obtained using the systems with the cylindrical magnetron have high physical and mechanical properties.

Key words: magnetron sputtering system, protective coatings, pipe internal surface, cylindrical magnetron, coating hardness.

URL: https://mfint.imp.kiev.ua/en/abstract/v44/i02/0241.html

DOI: https://doi.org/10.15407/mfint.44.02.0241

PACS: 62.20.Qp, 81.05.Bx, 81.15.Cd, 81.15.Rs

Citation: O. I. Shkurat, V. A. Baturin, S. M. Kravchenko, V. M. Kolomiets, I. M. Kononenko, І. G. Chyzhov, P. E. Samoilov, Yu. A. Pavlenko, S. O. Firstov, V. F. Gorban, and M. I. Danylenko, Magnetron Sputtering System with Cylindrical Magnetron for Obtaining of Internal Protective Coatings for Increasing a Pipe Resource, Metallofiz. Noveishie Tekhnol., 44, No. 2: 241—250 (2022)

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