Issues »  Volume 44, Issue 4

Modernization of Vacuum-Arc Deposition Technology of Multilayer Nanostructured Coatings

I. V. Serdyuk, V. O. Stolbovyi, A. V. Dolomanov, V. M. Domnych

National Science Center ‘Kharkiv Institute of Physics and Technology’, NAS of Ukraine, 1 Akademichna Str., UA-61108 Kharkiv, Ukraine

Received: 17.05.2021; final version - 11.02.2022. Download: PDF

The modernization of the vacuum-arc deposition technology of multilayer coatings is carried out. A prototype of a device designed to control the operation of cathodes and gas inlets in the process of applying simple and complex multilayer nanostructured vacuum-arc coatings is developed. This device is a 2-channel programmable digital device, one of the channels of which controls the operation of the cathodes, and the other channel controls the operation of the gas inlets. Thus, there is a possibility of simultaneous operation of two cathodes and two gas inlets. The thickness of the layers of the vacuum-arc coating, as well as the order of their application, can be regulated by the modes and duration of the operation of the control device channels. The use of this device makes it possible to obtain multilayer vacuum-arc WNbN/WNbC coatings with a microhardness of 27–31 GPa.

Key words: vacuum-arc deposition, multilayer coatings, cathode, gas inlet, programmable digital device, nanostructured coatings.

URL: https://mfint.imp.kiev.ua/en/abstract/v44/i04/0547.html

DOI: https://doi.org/10.15407/mfint.44.04.0547

PACS: 07.07.Tw, 68.60.-p, 81.07.-b, 81.15.-Aa, 81.15.-z, 89.20.Bb

Citation: I. V. Serdyuk, V. O. Stolbovyi, A. V. Dolomanov, and V. M. Domnych, Modernization of Vacuum-Arc Deposition Technology of Multilayer Nanostructured Coatings, Metallofiz. Noveishie Tekhnol., 44, No. 4: 547—563 (2022) (in Ukrainian)

REFERENCES
  1. A. A. Andreev, L. P. Sablev, and S. N. Grigoriev, Vakuumno-Dugovye Pokrytiya [Vacuum-Arc Coatings] (Kharkiv: NSC KIPT: 2010) (in Russian).
  2. O. V.Sobol', A. A. Andreev, S. N. Grigoriev, V. F. Gorban', V. A. Stolbovoy, I. V. Serdiuk, and V. E. Filchikov, Eastern-European Journal of Enterprise Technologies, 6, No. 5: 4 (2011) (in Russian).
  3. I. V. Serdiuk, A. A. Andreev, V. F. Gorban', O. V. Sobol', and V. A. Stolbovoy, J. Surf. Phys. Eng., 13: 1 (2015) (in Russian).
  4. A. A. Andreev, O. V. Sobol', I. V. Serdiuk, S. V. Federov, N. Ju. Cherkasova, and N. V. Solis, Perspektivnye Materialy, No. 3: 46 (2014) (in Russian).
  5. O. V. Sobol', A. A. Andreev, R. P. Mygushchenko, V. M. Beresnev, A. A. Meylekhov, A. A. Postelnyk, S. A. Kravchenko, Taha A. Tabaza, Safwan M. Al-Qawabah, Ubeidulla F. Al-Qawabeha, V. A. Stolbovoy, D. A. Kolesnikov, and M. G. Kovaleva, PAST. Series: Vacuum, Pure Materials, Superconductors, 1: 113 (2018).
  6. O. V. Sobol', A. A. Andreev, V. F. Gorban', V. A. Stolbovoy, N. V. Pinchuk, and A. A. Meylekhov, PAST. Series: Physics of Radiation Effect and Radiation Materials Science, 2: 96 (2015).
  7. A. A. Andreev, V. I. Kovalenko, V. G. Marinin, L. I. Martinenko, and V. A. Stolbovoy, ScienceRise, 5, No. 2: 22 (2016) (in Russian). Crossref
  8. V. A. Stolbovoy, J. Surf. Phys. Eng., 1: 3 (2016) (in Russian).
  9. V. Y. Novikov, V. M. Beresnev, D. A. Kolesnikov, O. N. Ivanov, S. V. Lytovchenko, V. A. Stolbovoy, I. V. Kolodiy, A. O. Kozachenko, M. G. Kovaleva, E. V. Kritsyna, and O. V. Glukhov, PAST. Series: Physics of Radiation Effect and Radiation Materials Science, 2: 120 (2019).
  10. V. F. Gorban', A. O. Andreev, V. A. Stolbovoi, A. M. Myslyvchenko, and A. D. Kostenko, J. Superhard Materials, 42: 25 (2020). Crossref
  11. E. Sheinman, Met. Sci. Heat Treat., 50: 600 (2008). Crossref
  12. C. Ducros, C. Cayron, and F. Sanchette, Surf. Coat. Tech., 201: 1 (2006). Crossref
  13. Iu. Sisoiev, I. Serdiuk, A. Dolomanov, and D. Kovteba, PAST. Series: Physics of Radiation Effect and Radiation Materials Science, 2: 109 (2017).
  14. O. V. Sobol', A. A. Andreev, R. P. Mygushchenko, V. M. Beresnev, A. A. Meylekhov, A. A. Postelnyk, S. A. Kravchenko, Taha A. Tabaza, Safwan M. Al-Qawabah, Ubeidulla F. Al-Qawabeha, V. A. Stolbovoy, I. V. Serdiuk, D. A. Kolesnikov, and M. G. Kovaleva, PAST. Series: Vacuum, Pure Materials, Superconductors, 1: 113 (2018).
  15. V. P. Rudenko, V. A. Stolbovoy, I. V. Serdiuk, and K. G. Kartmazov, Eastern-European Journal of Enterprise Technologies, 6, No. 1: 48 (2010) (in Russian).
  16. O. V. Sobol', A. A. Andreev, V. F. Gorban', V. A. Stolbovoy, N. V. Pinchuk, and A. A. Meylekhov, PAST. Series: Physics of Radiation Effect and Radiation Materials Science, 2: 96 (2015).
  17. U. S. Nyemchenko, V. M. Beresnev, O. V. Sobol', S. V. Lytovchenko, V. A. Stolbovoy, V. Ju. Novikov, A. A. Meylekhov, A. A. Postelnyk, and M. G. Kovaleva, PAST. Series: Vacuum, Pure Materials, Superconductors, 1: 101 (2016).
  18. V. O. Stolboviy, J. Nano-Electron. Phys., 9: 5 (2017). Crossref

Creative Commons License
This work is licensed under a Creative Commons Attribution-NoDerivatives 4.0 International License
© 2000–2022 “G. V. Kurdyumov Institute for Metal Physics of the N.A.S. of Ukraine”