Выпуски МФиНТ »  Том 44, выпуск 4

Modernization of Vacuum-Arc Deposition Technology of Multilayer Nanostructured Coatings

I. V. Serdyuk, V. O. Stolbovyi, A. V. Dolomanov, V. M. Domnych

Национальный научный центр «Харьковский физико-технический институт» НАН Украины, ул. Академическая, 1, 61108 Харьков, Украина

Получена: 17.05.2021; окончательный вариант - 11.02.2022. Скачать: PDF

The modernization of the vacuum-arc deposition technology of multilayer coatings is carried out. A prototype of a device designed to control the operation of cathodes and gas inlets in the process of applying simple and complex multilayer nanostructured vacuum-arc coatings is developed. This device is a 2-channel programmable digital device, one of the channels of which controls the operation of the cathodes, and the other channel controls the operation of the gas inlets. Thus, there is a possibility of simultaneous operation of two cathodes and two gas inlets. The thickness of the layers of the vacuum-arc coating, as well as the order of their application, can be regulated by the modes and duration of the operation of the control device channels. The use of this device makes it possible to obtain multilayer vacuum-arc WNbN/WNbC coatings with a microhardness of 27–31 GPa.

Ключевые слова: vacuum-arc deposition, multilayer coatings, cathode, gas inlet, programmable digital device, nanostructured coatings.

URL: https://mfint.imp.kiev.ua/ru/abstract/v44/i04/0547.html

PACS: 07.07.Tw, 68.60.-p, 81.07.-b, 81.15.-Aa, 81.15.-z, 89.20.Bb

ЦИТИРОВАННАЯ ЛИТЕРАТУРА
  1. A. A. Andreev, L. P. Sablev, and S. N. Grigoriev, Vakuumno-Dugovye Pokrytiya [Vacuum-Arc Coatings] (Kharkiv: NSC KIPT: 2010) (in Russian).
  2. O. V.Sobol’, A. A. Andreev, S. N. Grigoriev, V. F. Gorban’, V. A. Stolbovoy, I. V. Serdiuk, and V. E. Filchikov, Eastern-European Journal of Enterprise Technologies, 6, No. 5: 4 (2011) (in Russian).
  3. I. V. Serdiuk, A. A. Andreev, V. F. Gorban’, O. V. Sobol’, and V. A. Stolbovoy, J. Surf. Phys. Eng., 13: 1 (2015) (in Russian).
  4. A. A. Andreev, O. V. Sobol’, I. V. Serdiuk, S. V. Federov, N. Ju. Cherkasova, and N. V. Solis, Perspektivnye Materialy, No. 3: 46 (2014) (in Russian).
  5. O. V. Sobol’, A. A. Andreev, R. P. Mygushchenko, V. M. Beresnev, A. A. Meylekhov, A. A. Postelnyk, S. A. Kravchenko, Taha A. Tabaza, Safwan M. Al-Qawabah, Ubeidulla F. Al-Qawabeha, V. A. Stolbovoy, D. A. Kolesnikov, and M. G. Kovaleva, PAST. Series: Vacuum, Pure Materials, Superconductors, 1: 113 (2018).
  6. O. V. Sobol’, A. A. Andreev, V. F. Gorban’, V. A. Stolbovoy, N. V. Pinchuk, and A. A. Meylekhov, PAST. Series: Physics of Radiation Effect and Radiation Materials Science, 2: 96 (2015).
  7. A. A. Andreev, V. I. Kovalenko, V. G. Marinin, L. I. Martinenko, and V. A. Stolbovoy, ScienceRise, 5, No. 2: 22 (2016) (in Russian). Crossref
  8. V. A. Stolbovoy, J. Surf. Phys. Eng., 1: 3 (2016) (in Russian).
  9. V. Y. Novikov, V. M. Beresnev, D. A. Kolesnikov, O. N. Ivanov, S. V. Lytovchenko, V. A. Stolbovoy, I. V. Kolodiy, A. O. Kozachenko, M. G. Kovaleva, E. V. Kritsyna, and O. V. Glukhov, PAST. Series: Physics of Radiation Effect and Radiation Materials Science, 2: 120 (2019).
  10. V. F. Gorban’, A. O. Andreev, V. A. Stolbovoi, A. M. Myslyvchenko, and A. D. Kostenko, J. Superhard Materials, 42: 25 (2020). Crossref
  11. E. Sheinman, Met. Sci. Heat Treat., 50: 600 (2008). Crossref
  12. C. Ducros, C. Cayron, and F. Sanchette, Surf. Coat. Tech., 201: 1 (2006). Crossref
  13. Iu. Sisoiev, I. Serdiuk, A. Dolomanov, and D. Kovteba, PAST. Series: Physics of Radiation Effect and Radiation Materials Science, 2: 109 (2017).
  14. O. V. Sobol’, A. A. Andreev, R. P. Mygushchenko, V. M. Beresnev, A. A. Meylekhov, A. A. Postelnyk, S. A. Kravchenko, Taha A. Tabaza, Safwan M. Al-Qawabah, Ubeidulla F. Al-Qawabeha, V. A. Stolbovoy, I. V. Serdiuk, D. A. Kolesnikov, and M. G. Kovaleva, PAST. Series: Vacuum, Pure Materials, Superconductors, 1: 113 (2018).
  15. V. P. Rudenko, V. A. Stolbovoy, I. V. Serdiuk, and K. G. Kartmazov, Eastern-European Journal of Enterprise Technologies, 6, No. 1: 48 (2010) (in Russian).
  16. O. V. Sobol’, A. A. Andreev, V. F. Gorban’, V. A. Stolbovoy, N. V. Pinchuk, and A. A. Meylekhov, PAST. Series: Physics of Radiation Effect and Radiation Materials Science, 2: 96 (2015).
  17. U. S. Nyemchenko, V. M. Beresnev, O. V. Sobol’, S. V. Lytovchenko, V. A. Stolbovoy, V. Ju. Novikov, A. A. Meylekhov, A. A. Postelnyk, and M. G. Kovaleva, PAST. Series: Vacuum, Pure Materials, Superconductors, 1: 101 (2016).
  18. V. O. Stolboviy, J. Nano-Electron. Phys., 9: 5 (2017). Crossref

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