Issues »  Volume 45, Issue 2

Peculiarities of Structuring of Thin Copper Films and Determination of Their Plasmon-Resonance Properties

M. Yu. Barabash$^{1,2}$, A. A. Kolesnichenko$^{1}$, D. S. Leonov$^{1}$, R. V. Lytvyn$^{1,3}$, A. Yu. Sezonenko$^{1}$, I. V. Lukianenko$^{1,2}$, Ie. G. Byba$^{1,2}$, M. M. Yamshynskyi$^{1,2}$, Ye. M. Boboshko$^{1,2}$

$^{1}$Technical Centre, NAS of Ukraine, 13 Pokrovs’ka Str., UA-04070 Kyiv, Ukraine
$^{2}$National Technical University of Ukraine ‘Igor Sikorsky Kyiv Polytechnic Institute’, 37 Peremohy Ave., UA-03056 Kyiv, Ukraine
$^{3}$I. M. Frantsevich Institute for Problems in Materials Science, NAS of Ukraine, 3 Omeljan Pritsak Str., UA-03142 Kyiv, Ukraine

Received: 21.01.2023; final version - 10.03.2023. Download: PDF

The main task of the work was to determine the peculiarities of structure formation of the copper films with a thickness of 100–300 nm on glass substrates obtained by thermal sputtering and to study the effects of optical resonances in thin metal copper films using absorption and Raman scattering spectra. The research of the atomic crystal structure of thin copper films was carried out using X-ray diffractometry. The formation mechanism of insular thin films was analysed. The result of the structure transformation is determined by the interaction energy of atoms in film with each other and with the substrate, as well as physical and technological parameters of condensation and subsequent processing regime of deposition and annealing. Optical resonances of copper films on glass substrates were identified using absorption and Raman scattering spectra.

Key words: diffractometry, electron microscopy, optical spectroscopy, thermal spraying, thin films, dimensional effects.

URL: https://mfint.imp.kiev.ua/en/abstract/v45/i02/0169.html

DOI: https://doi.org/10.15407/mfint.45.02.0169

PACS: 68.37.-d, 68.55.-a, 78.20.-e, 78.67.-n, 81.15.-z, 81.15.Kk

Citation: M. Yu. Barabash, A. A. Kolesnichenko, D. S. Leonov, R. V. Lytvyn, A. Yu. Sezonenko, I. V. Lukianenko, Ie. G. Byba, M. M. Yamshynskyi, and Ye. M. Boboshko, Peculiarities of Structuring of Thin Copper Films and Determination of Their Plasmon-Resonance Properties, Metallofiz. Noveishie Tekhnol., 45, No. 2: 169—182 (2023) (in Ukrainian)

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