Peculiarities of Structuring of Thin Copper Films and Determination of Their Plasmon-Resonance Properties
M. Yu. Barabash$^{1,2}$, A. A. Kolesnichenko$^{1}$, D. S. Leonov$^{1}$, R. V. Lytvyn$^{1,3}$, A. Yu. Sezonenko$^{1}$, I. V. Lukianenko$^{1,2}$, Ie. G. Byba$^{1,2}$, M. M. Yamshynskyi$^{1,2}$, and Ye. M. Boboshko$^{1,2}$
$^{1}$Технический центр НАН Украины, ул. Покровская, 13, 04070 Киев, Украина
$^{2}$Национальный технический университет Украины «Киевский политехнический институт имени Игоря Сикорского», просп. Победы, 37, 03056 Киев, Украина
$^{3}$Институт проблем материаловедения им. И. Н. Францевича НАН Украины, ул. Омельяна Прицака, 3, 03142 Киев, Украина
Получена: 21.01.2023; окончательный вариант - 10.03.2023. Скачать: PDF
The main task of the work was to determine the peculiarities of structure formation of the copper films with a thickness of 100–300 nm on glass substrates obtained by thermal sputtering and to study the effects of optical resonances in thin metal copper films using absorption and Raman scattering spectra. The research of the atomic crystal structure of thin copper films was carried out using X-ray diffractometry. The formation mechanism of insular thin films was analysed. The result of the structure transformation is determined by the interaction energy of atoms in film with each other and with the substrate, as well as physical and technological parameters of condensation and subsequent processing regime of deposition and annealing. Optical resonances of copper films on glass substrates were identified using absorption and Raman scattering spectra.
Ключевые слова: diffractometry, electron microscopy, optical spectroscopy, thermal spraying, thin films, dimensional effects.
URL: https://mfint.imp.kiev.ua/ru/abstract/v45/i02/0169.html
PACS: 68.37.-d, 68.55.-a, 78.20.-e, 78.67.-n, 81.15.-z, 81.15.Kk