Выпуски МФиНТ »  Том 44, выпуск 10

Thermal and Ion Treatment Effect on Nanoscale Thin Films Scratch Resistance

V. Yanchuk$^{1}$, I. Kruhlov$^{1}$, V. Zakiev$^{1,2}$, A. Lozova$^{1}$, B. Trembach$^{3}$, A. Orlov$^{1}$, S. Voloshko$^{1}$

$^{1}$Национальный технический университет Украины «Киевский политехнический институт имени Игоря Сикорского», просп. Победы, 37, 03056 Киев, Украина
$^{2}$Национальный авиационный университет, просп. Любомира Гузара, 1, 03058 Киев, Украина
$^{3}$Частное акционерное общество «Новокраматорский машиностроительный завод», ул. Олекса Тихого, 5, 84305 Краматорск, Украина

Получена: 28.07.2022; окончательный вариант - 11.08.2022. Скачать: PDF

In this study, a microtribological characteristics of Ni(25 nm)/Cu(25 nm)/ Cr(25 nm) three-layer thin films fabricated using DC magnetron sputtering are explored using progressive scratch test. Four various types of thin films are examined and compared: as-deposited film, film after low-energy Ar$^{+}$ ion irradiation, film annealed at 450°С for 15 minutes in vacuum, and film after ion irradiation followed by vacuum annealing. Scratch tests are supplemented by structural (XRD) and chemical (AES) experimental studies. As figured out, the sample after ion irradiation followed by annealing demonstrated the best microtribological and wear resistance characteristics among all studied films. The highest scratch resistance, smooth scratch shape, the lowest value of peak tangential force as well as the absence of side cracks and film delamination are revealed for the sample after irradiation followed by annealing. The likely reasons of this behaviour are discussed.

Ключевые слова: thermal and ion treatment, thin films, scratch resistance, microtribological resistance, scratch test.

URL: https://mfint.imp.kiev.ua/ru/abstract/v44/i10/1275.html

PACS: 07.10.-h, 68.35.Fx, 68.35.Rh, 68.55.Ln, 81.40.-z

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